柳克強 副教授  清華大學工程與系統科學系  
                

 

工科新館 R503   分機:5820

 

Major Equipment:

  • Inductive-Coupled Plasma System 

Features:

  • Planar inductive coil

  • Pumping system:                  Diffusion pump (300 l/s)       

  • Gases:                                Ar, He, Ar/O2, N2 

  • Chamber:    SS304,        F400 mm, H 400 mm

  • Diagnostic Ports:             KF40 x 6, NW 100 x 2 

  • RF source:                     13.56 MHz, 1 kW

 

  • Electron Cyclotron Resonance Microwave Plasma System

Features:

  • TE01 mode compact microwave  applicator 

  • Ring shape permanent magnets 

  • Pumping  system:              TMP pump (300 l/s)           

  • Gases:      Ar, He, Ar/O2, N2 

  • Chamber:    SS304,  F500 mm, H 300 mm

  • Diagnostic Ports:     KF25 x 8

  • Microwave source: 2.45 GHz, 5 kW  

 

  • Langmuir Probe System (homemade)

Features:

  • Measure plasma density, electron temperature, plasma potential

  • Computer automated data acquisition and control (LabView)

  • Spatially (5 mm) & temporally (50 KHz) resolved measurements

  • RF compensated (13.56 MHz)

  • Linear traveling length:   300 mm

  • Probe : Tungsten tip, F 0.25 mm, L 10 mm

 

  • 36 GHz Heterodyne Interferometer (homemade)

Features:

  • Measure line-averaged plasma density

  • Computer automated data acquisition and control (LabView)

  • Temporally resolved measurements ( 50 kHz)

  • Frequency: 36 GHz

  • Phase detection: Heterodyne

 

  • Ion Energy Analyzer (homemade)

Features:

  • Measurement of ion energy distribution on a biased electrode

  • Computer automated data acquisition and control (LabView)

  • Temporally resolved measurements ( 50 kHz)

  • Number of electrode: 4

  • Size: F 15 mm

 

 

  • Monochromator (Ocean Optics S2000)

Features:

  • Measurement of spectrum of plasma induced optical emission

  • Number of Grating: 4

  • Input : optical fiber