ESS4810 Micro System Fabrication and Experiment, 微系統製造與實驗

Course Description

Understanding the fundamental micro fabrication technology for MicroElectroMechanical Systems (MEMS).  There will be five basic MEMS fabrication techniques taught, including wafer cleaning and thermal oxidation, microlithography and wet/dry etching, e-beam evaporation, bulk and surface micromachining, and micro electro-plating.  Students will be broken into 4 groups and finish all five labs besides lectures.