ESS5341 Plasma Laboratory and Experiment Design Methods, 電漿實驗與實驗設計方法


Course Description:

The purpose of this course is to introduce students the fundamentals of plasma laboratory techniques including plasma sourses and plasma diagnostic techniques, as well as general experimental design methods.

A. Vacuum system:
Vacuum pumps and gauges.
High vacuum systems: Diffusion pump system & Turbo-molecular pump system.

B. Plasma Sources
1. Inductively-coupled plasmas (ICP)
2. Electron Cyclotron Resonance (ECR) Microwave Plasmas
3. DC Plasmas*

C. Plasma Diagnostics
1. Langmuir Probe
2. Microwave Interferometer
3. Spectroscopy of Plasma Induced Optical Emissions
4. Computer Data Acquisition and Control

D. Experiment Design Methods

課程說明:

本課程介紹電漿實驗技術與實驗設計與數據分析方法,在電漿實驗方面,包括

電漿源與電漿量測二方面,實驗與講課內容包括:

 

1. 真空系統

2. 電漿源

  a. 電感式射頻電漿源

  b. 直流電漿源

3. 電漿量測

  a. 蘭牟爾探針

  b. 微波干涉儀

  c. 電漿放射光譜分析

  d. 射頻阻抗量測

  e. 電漿蝕刻機台實驗

  f. 場發射量測實驗

  g. 電腦數據擷取與控制

4. 實驗設計方法與數據分析


註1: ch. 11 12 省略,有興趣的同學,建議修電路二。
註2: PSpice章節均省略,有興趣的同學,建議修電子實驗(三)。
註3: Application章節均省略,有興趣的同學,建議自行閱讀。