ESS5560 Analysis techniques of nano-scale thin films, 奈米薄膜分析技術


Course Description:

This course describes the application techniques of material characterization tools, such as photon beam, electron beam, ion beam, tip probe, and neutron beams for the ultra-thin film analysis.  The analysis methods include, energy spectroscopy, diffraction and scattering method, and imaging technology. This course will emphasize on the limitation of each material analysis method, the sources of the beam and detection methods.

 

課程說明:

本課程介紹如何藉光子、電子、離子, 探針及中子束等研究工具分析材料表面及薄膜奈米尺度下之原子結構與電子結構及其相關技術。其方法包括薄膜之光譜學、 繞射及散射學以及影相學三部份,並探討每一技術之運用極限,以及其相關之真空技術,薄膜工程以及光子與粒子之產生及度量技術之簡介。