ESS4520 Introduction to Thin Film Engineering, 薄膜工程導論

Course Description:

This course firstly introduces vacuum technology and kinetics of surface processes. The major content includes the vapor deposition processes, PVD and CVD, and film formation and structure. The methods of characterization of thin film will be briefly introduced. To take this course, students are required to have some background on Materials Science (ESS2500 Introduction to Materials Science or Physical Metallurgy I,II) and on Thermodynamics of Materials (ESS2510 or equivalent).